脈衝雷射沈積系統 / Plused Laser Deposition System

----------------------------------------------

PLD 靶材 / Target

----------------------------------------------

超高真空零件 高溫加熱器 / HT Heater

----------------------------------------------

視窗擋板 / Viewport Shutter

----------------------------------------------

傳送桿 / Transfer Rod

----------------------------------------------

3吋操控系統 / 3 inch Manipulator

----------------------------------------------

超高真空腔體 / Chamber