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超高真空腔體 / Chamber |
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脈衝雷射沈積系統 / Plused Laser Deposition System |
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PLD 靶材 / Target |
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超高真空零件 高溫加熱器 / HT Heater |
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視窗擋板 / Viewport Shutter |
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傳送桿 / Transfer Rod |
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3吋操控系統 / 3 inch Manipulator |
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超高真空腔體 / Chamber |
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